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Deposition Thin Films or Grow Nanowire Used PE-CVD Tube Furnace System Upto 1200c

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Zhengzhou TCH Instrument Co., Ltd
[China]

Address
cuizhu street  Zhengzhou Henan
Phone
86-1813577-8330
Contact name
Dorry

Quick Information

  • Brand Name: TCH
  • Place of Origin: China
  • Model Number : TCH-OTF-1200X-PEC4LV
  • Power : Electronic
  • Usage : Process Testing Machine
  • Product name : pecvd tube furnace system

Description

Deposition Thin Films or Grow Nanowire Used PE-CVD Tube Furnace System 
 

TCH-OTF-1200X-PEC4LV is a CE certified compact PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system, which consists of 300W RF plasma source, 2"  or 3.14" O.D optional split tube furnace, 4 channels precision mass flow meter with gas mixing tank, and high-quality mechanical pump.   The PE-CVD furnace is an ideal and affordable tool to deposit thin films or grow nanowire from a gas state (vapor) to a solid state, and benefits:

  • Lower temperature processing compared to conventional CVD. 
  • Film stress can be controlled by high/low frequency mixing techniques. 
  • Control over stoichiometry via process conditions.
  • Offers a wide range of material deposition, including SiOx, SiNx, SiOxNy and Amorphous silicon (a-Si:H) deposition.

Specification of the deposition thin films or grow nanowire used PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system

Split Tube furnace


 
  • 1200oC Max. working temperature for < 60 minutes
  • 1100oC Max for continuous heating
  • 30 segments programmable precision digital temperature controller
  • 440 mm length single heating zone and 150 mm length constant temperate zone
  • High purity quartz tube optional 
    One pair of vacuum sealed flange with valves
    • 2"OD x 1.7"ID x  48" Length 
    • 3.14"OD x 2.83"ID x 48'' Length
  •  
  • Input power: 208 – 240V AC input, single phase at max. 4KW
  • Two zones split furnace -OTF1200X-II is optional at extra cost
Plasma RF Power Supply
 
 
  • Output Power:          5 -300W adjustable with ± 1% stability
  • RF frequency:          13.56 MHz ±0.005% stability
  • Reflection Power:     200W max.
  • Matching:                Automatic
  • RF Output Port:       50 Ω, N-type, female
  • Noise:                    <50 dB. 
  • Cooling:                  Air cooling.
  • Power:                   208-240VAC, 50/60Hz
  • Note:                      This RF power supply can accept 50 - 80 mm Max. quartz tube  by changing flange
Anti-corrosive Pressure Gauge
 
  • 3.8x10-5 to 1125 Torr measurement range
  • Anti-corrosive, gas-type independent 
  • High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
  • Fast atmospheric detection eliminates waiting time and shortens process cycle
  • Easy to exchange plug & play sensor element
  Vacuum Pump and valve
 
  • Heavy Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two Stage Exhaust System installed in the bottom case with max. vacuum pressure 10-2 torr.
  •  KFD25 adapter and stainless steel pipe are connected between pump and tube flange with precision ball valve
  •  Digital vacuum pressure gauge and display are installed with the furnace
Option: For precise control of the vacuum pressure, we recommend you choose our turn-key solution EQ-VPC-MV. This is a vacuum pressure regulating system with motorized valve and gauge. It controls pressure range from 10^-6 torr ~ 760 torrs.
Optional Oilless Pump Please order the oilless pump for zero contamination:
Mass Flowmeter
 
  • 4-Channelled Gas Mixing
  • Made of 316 stainless steel valve
  • Gas mixing tank: Φ80X120mm  
  • 600mm(L) x 745mm(W) x 700mm(H)
  • 23W per channel
  •  AC 220V/50Hz Single phase
Temperature Controller
  • MET certified 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Built in PID Auto-Tune function with overheating & broken thermocouple protection.
  • Over temperature protection and alarm allows for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
Optional
 

bubbler or evaporator for CVD

Constant temperature control module

crucible
Overall dimensions
  • Furnace: 550mm(L) x 380mm(W) x 520mm(H) 
  • 2 Bottom Mobile case together: 1200mm(L) x 1200mm(W) x 1200mm(H)
  • Net weight: 220 lbs
  • Shipping weight: 350 lbs
Warranty  One year limited warranty with lift time support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.)


Compliance
 
  • CE Certified
Patten Number: ZL-2011-2-0355777.1 
Warning

 
  • The tube furnaces with quartz tube are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
  • The flow rate for gasses should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
  • we reserve right to modify PECVD design at  any time without notice but promise that quality will meet the specifications above
Shipping Dimensions
  • Pallet #1: 48" x 40" x 60"
  • Pallet #2: 48" x 40" x 40"
  • Pallet #3: 48" x 40" x 40"
  • Pallet #4: 48" x 40" x 40"
Total Shipping Weight 500 kg (1100 lbs)

 

reference picture of the deposition thin films or grow nanowire used PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system

 

other lab tube furnaces for your choice:

 


Company Information

Zhengzhou TCH Instrument Co., Ltd. is established with the goal of providing researchers with specialized instruments designed to meet their unique demands. We has grown into one of the material science market’s sources of quality instruments overseas. Although the work of the research community has changed quite a bit over the last years,Zhengzhou TCH Instrument Co., Ltd , through constant innovation, continues to provide the highest-quality instruments and unparalleled service, to meet and exceed all of our customers’ needs.

Zhengzhou TCH Instrument Co., Ltd is a leading developer of lab instruments and related products. Our products are used by lab research professionals worldwide. Throughout our history Zhengzhou TCH Instrument Co., Ltd has been synonymous with quality.

Contact Email: tchinstrumenttch(at)163.com
Mobile: 0086 18135778330


Price

  • Delivery Port : China port

Packaging & Delivery

  • Delivery Lead Time : within 20 days
  • Supply Ability : 300 set per months

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